• DocumentCode
    1910780
  • Title

    Electrical modelling of Kelvin structures for the derivation of low specific contact resistivity

  • Author

    Reeves, Geoffrey K. ; Holland, Anthony S. ; Harrison, Barry ; Leech, Patrick W.

  • Author_Institution
    Royal Melbourne Institute of Technology, Melbourne, Australia
  • fYear
    1997
  • fDate
    22-24 September 1997
  • Firstpage
    492
  • Lastpage
    495
  • Keywords
    Bridge circuits; Conductivity; Contact resistance; Electrical resistance measurement; Error correction; Kelvin; Ohmic contacts; Resistors; Semiconductor device testing; Semiconductor process modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194473
  • Filename
    1503403
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1910780