DocumentCode
1910845
Title
Development of the Next Generation of Insulated Gate Bipolar Tranistors based on Trench Technology
Author
Udrea, F. ; Chan, S.S.M. ; Thomson, J. ; Keller, S. ; Amaratunga, G.A.J. ; Millington, A.D. ; Waind, P.R. ; Crees, D.E.
Author_Institution
University of Cambridge, UK
fYear
1997
fDate
22-24 September 1997
Firstpage
504
Lastpage
507
Keywords
Breakdown voltage; Capacitors; Cathodes; Doping profiles; Dry etching; Electric breakdown; Geometry; Insulated gate bipolar transistors; Insulation; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194476
Filename
1503406
Link To Document