Title :
Bubble pump for integrated nanofluidics
Author :
Tas, N.R. ; Berenschot, J.W. ; Sanders, R. G P ; Lammerink, T.S.J. ; Elwenspoek, M. ; van den Berg, A.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
A new concept for liquid manipulation has been developed and implemented in surface micromachined fluid channels. It is based on the surface tension directed injection of a gas into the liquid flow through micron sized holes in the microchannel wall. The injected gas is directed to an exhaust by a cross-sectional asymmetry of the microchannel, and thereby moves minute liquid volumes. Successful pumping experiments have been performed with single stroke volumes in the range of 10 - 40 pL at frequencies around 1 Hz
Keywords :
integrated circuit design; micromachining; micropumps; nanotechnology; 1 Hz; bubble pump; cross-sectional asymmetry; integrated nanofluidics; liquid manipulation; microchannel wall; micron sized holes; single stroke volumes; surface micromachined fluid channels; surface tension directed injection; Biomembranes; Chemicals; Control systems; Fluid flow; Frequency; Microchannel; Nanofluidics; Optical control; Pumps; Surface tension;
Conference_Titel :
Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on
Conference_Location :
Maui, HI
Print_ISBN :
0-7803-7215-8
DOI :
10.1109/NANO.2001.966466
