Title :
Low temperature behaviour of submicron accumulation mode p-channel SOI MOSFETs
Author :
Rotondaro, A.L.P. ; Magnusson, U. ; Simoen, E. ; Claeys, C. ; Colinge, J-P.
Author_Institution :
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium.
Abstract :
The conduction mechanisms of submicron accumulation mode SOI pMOSFETs are investigated for the device operation at T=77K and T=4.2K. A physical interpretation for the suppression of some current components is given. Finally, the room temperature analytical model is extended and experimentally validated for cryogenic operation analysis.
Keywords :
Analytical models; Cryogenics; MOSFETs; Microelectronics; Nitrogen; Performance analysis; Semiconductor films; Substrates; Temperature dependence; Threshold voltage;
Conference_Titel :
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location :
Leuven, Belgium
