DocumentCode
1910985
Title
The concept of a high-brightness, miniaturized gas field ion source
Author
Tondare, V.N. ; Hagen, C.W. ; Kruit, P.
Author_Institution
Fac. of Appl. Sci., Delft Univ. of Technol., Netherlands
fYear
2003
fDate
7-11 July 2003
Firstpage
307
Lastpage
308
Abstract
In this paper, we propose to miniaturize an argon (Ar) GFIS at micron or sub-micron scale. The source can be operated at room temperature and high pressure (100 mbar) and voltages below 140 Volts (i.e the minimum in the Paschen curve for Ar-gas) to avoid Ar gas discharges.
Keywords
argon; brightness; ion sources; 100 mbar; 293 to 298 K; Ar; Ar gas discharges; argon; brightness; miniaturized gas field ion source; paschen curve; room temperature; voltages; Argon; Atomic measurements; Brightness; Current density; Electrostatics; Geometry; Ion sources; Lenses; Polarization; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location
Osaka, Japan
Print_ISBN
4-8181-9515-4
Type
conf
DOI
10.1109/IVMC.2003.1223106
Filename
1223106
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