• DocumentCode
    1910999
  • Title

    The atomic fabrication of a silicon based quantum computer

  • Author

    Simmons, M.Y. ; Schofield, S.R. ; O´Brien, J.L. ; Curson, N.J. ; Clark, R.G. ; Buehle, T.M. ; McKinnon, R.P. ; Brenner, R. ; Reilly, D.J. ; Dzurak, A.S. ; Hamilton, A.R.

  • Author_Institution
    Dept. of Phys., New South Wales Univ., Kensington, NSW, Australia
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    471
  • Lastpage
    476
  • Abstract
    Presents recent results on two different approaches to realize a solid-state quantum computer based in silicon, using phosphorus atoms as qubits. In the first approach the device is built from the ´bottomup´ using a combination of atomic lithography with a scanning tunneling microscope and high quality silicon epitaxial growth using molecular beam epitaxy. In the second approach ion implantation is used to implant the phosphorus atoms from the ´top-down´. In both cases surface control electrodes are fabricated by conventional electron beam lithography. Techniques for qubit read-out utilising coincidence measurements on twin single electron transistors are also presented
  • Keywords
    electron beam lithography; elemental semiconductors; ion implantation; molecular beam epitaxial growth; phosphorus; quantum computing; scanning tunnelling microscopy; silicon; single electron transistors; Si:P; atomic fabrication; atomic lithography; coincidence measurements; electron beam lithography; ion implantation; molecular beam epitaxy; quantum computer; qubits; scanning tunneling microscope; surface control electrodes; twin single electron transistors; Atomic beams; Atomic layer deposition; Epitaxial growth; Fabrication; Lithography; Microscopy; Quantum computing; Silicon; Solid state circuits; Tunneling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on
  • Conference_Location
    Maui, HI
  • Print_ISBN
    0-7803-7215-8
  • Type

    conf

  • DOI
    10.1109/NANO.2001.966469
  • Filename
    966469