Nano meter stepping drive of surface acoustic wave motor

Author

Shigematsu, Takashi ; Kurosawa, Minoru Kuribayashi ; Asai, Katsuhiko

Author_Institution

Dept. of Adv. Appl. Electron., Tokyo Inst. of Technol., Yokohama, Japan

fYear

2001

fDate

2001

Firstpage

495

Lastpage

500

Abstract

A high resolution, from nanometer to sub-nanometer, stepping drive of a surface acoustic wave (SAW) motor is presented in this paper. A step displacement was controlled easily by a number of driving waves from centimeter order to nanometer order. Reduction of the driving waves down to 25 cycles, at 100 V_peak driving voltage and 30 N pre-load condition, brought about 2 run stepping drive with our experimental setup at open loop condition. We also demonstrated a sub-nanometer stepping drive. These experimental results indicate that the surface acoustic wave motor has subnanometer positioning ability with centimeter stroke

Keywords

motor drives; nanotechnology; position control; stepping motors; surface acoustic wave devices; ultrasonic motors; 10 V; 2 nm; SAW motor; driving voltage; driving waves; nanometer stepping drive; open loop condition; positioning; pre-load condition; step displacement; stepping drive; surface acoustic wave motor; surface acoustic wave motor stroke; ultrasonic motor; Acoustic transducers; Acoustic waves; Friction; Micromotors; Silicon; Stators; Steel; Surface acoustic wave devices; Surface acoustic waves; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on

Conference_Location

Maui, HI

Print_ISBN

0-7803-7215-8

Type

conf

DOI

10.1109/NANO.2001.966473

Filename

966473