• DocumentCode
    1911252
  • Title

    The role of energy transport and heat conduction in the prebreakdown stage of high-pressure plasma processing

  • Author

    Wu, Chao-Hsin ; Zhao, Hang ; Guo, Jing-Ming

  • Author_Institution
    Dept. of Electr. Eng., Auburn Univ., AL, USA
  • fYear
    1993
  • fDate
    7-9 June 1993
  • Firstpage
    89
  • Abstract
    Summary form only given. The electron role in streamer propagation in a high-voltage pulsed atmospheric discharge is studied in order to obtain a better understanding of energy transport and heat conduction. This analysis will provide information for optimizing the design of an atmospheric plasma processing reactor. A self-consistent 2-D three-moment fluid model in a cylindrically symmetric geometry between two parallel plates has been used to investigate the electron energy transport and heat conduction effect for steamers in the prebreakdown stage. The phenomenological heat conduction term in this model is analyzed to illustrate its role in affecting the streamer speed. A Monte Carlo simulation results has been used to assess the validity of the model and to illustrate the importance of energy transport and heat conduction. The comparison shows that the energy transport and heat conduction are critical in obtaining an accurate model for streamer propagation. The high-energy sheath region close to the high-density plasma provides the energy to the neighborhood of the sheath area by heat conduction.
  • Keywords
    high-pressure effects; Monte Carlo simulation; atmospheric plasma processing reactor; cylindrically symmetric geometry; electron energy transport; electron role; energy transport; heat conduction; high-density plasma; high-energy sheath region; high-pressure plasma processing; high-voltage pulsed atmospheric discharge; parallel plates; prebreakdown stage; self-consistent 2-D three-moment fluid model; streamer propagation; Atmospheric modeling; Design optimization; Electrons; Geometry; Inductors; Information analysis; Plasma materials processing; Plasma sheaths; Plasma transport processes; Solid modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1993. IEEE Conference Record - Abstracts., 1993 IEEE International Conference on
  • Conference_Location
    Vancouver, BC, Canada
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-1360-7
  • Type

    conf

  • DOI
    10.1109/PLASMA.1993.593055
  • Filename
    593055