Title :
Single-sided grooved type or double-sided grooved type resonators manufactured by chemical etching process
Author :
Nagaura, Y. ; Nagaura, Z. ; Nagaura, K. ; Nagato, K. ; Emoto, K. ; Imani, K. ; Kinoshita, K. ; Yokomizo, S. ; Nakazawa, M.
Author_Institution :
Nagaura Lab. Inc., Fukuoka, Japan
Abstract :
Novel quartz resonators of single-sided grooved type and double-sided grooved type in two steps shape were successfully manufactured by the chemical etching processes
Keywords :
crystal resonators; etching; SiO2; chemical etching process; double-sided grooved type resonators; quartz resonators; single-sided grooved type resonators; Chemical industry; Chemical processes; Chemical technology; Cities and towns; Coaxial components; Electric variables; Etching; Frequency; Manufacturing processes; Shape;
Conference_Titel :
Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on
Conference_Location :
Maui, HI
Print_ISBN :
0-7803-7215-8
DOI :
10.1109/NANO.2001.966479
