Title :
A novel Love mode device with nanocrystalline ZnO film for gas sensing applications
Author :
Kalantar-zadeh, Kourosh ; Trinchi, Adrian ; Wlodarski, Wojtek ; Holland, Anthony ; Atashbar, Massood Z.
Author_Institution :
Sch. of Electr. & Comput. Eng, RMIT Univ., Melbourne, Vic., Australia
Abstract :
A novel surface acoustic wave (SAW) gas sensor is presented. The sensor is based on a ZnO (2.8 μm)/90° rotated ST-cut quartz crystal structure. Such a structure allows the propagation of Love mode SAWs. The ZnO layer performs as both the acoustic wave guiding media and the gas sensitive film. The response of the sensor was investigated for different concentrations of O2 and 100ppm C3H8 in N2 gas. The sensor is highly stable due to the large electromechanical coupling coefficient of the device, and is able to detect oxygen concentrations as low as 1 ppm in nitrogen gas
Keywords :
Love waves; gas sensors; piezoelectric transducers; surface acoustic wave sensors; zinc compounds; 2.8 micron; Love mode device; N2; O2; SAW sensor; ZnO; acoustic wave guiding media; electromechanical coupling coefficient; gas sensing applications; gas sensitive film; propane; rotated ST-cut quartz crystal structure; Acoustic propagation; Acoustic sensors; Acoustic waves; Electromechanical sensors; Gas detectors; Nanoscale devices; Nitrogen; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on
Conference_Location :
Maui, HI
Print_ISBN :
0-7803-7215-8
DOI :
10.1109/NANO.2001.966484
