Title :
Gate bias aging of unhydrogenated polycrystalline silicon TFTs
Author :
Tala-Ighil, B. ; Toutah, A. ; Mohammed-Brahim, T. ; Mourgues, K. ; Raoult, F. ; Lhermite, H. ; Bonnaud, O.
Author_Institution :
Site Universitaire, LUSAC, FRANCE
fDate :
22-24 September 1997
Keywords :
Active matrix liquid crystal displays; Aging; Amorphous silicon; Crystalline materials; Plasma applications; Plasma chemistry; Plasma sources; Stress; Thin film transistors; Threshold voltage;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194502