Title :
Effective multi-stage test equipment capacity allocation for semiconductor fabrication yield enhancement
Author :
Chen, Kyle D. ; Akella, Ramakrishna ; Emami, Iraj ; McIntyre, Mike
Author_Institution :
Comput. Sci. Dept., IBM Corp., San Jose, CA, USA
Abstract :
We formulate a multi-stage inspection planning model based on configurations in actual semiconductor fab-lines, specifically taking into account both the capacity constraint and the congestion effects at the inspection station. We propose a new mixed First-Come-First-Serve (FCFS) and Last-Come-First-Serve (LCFS) discipline for serving the inspection samples to expedite the detection of potential yield problems. Employing this mixed FCFS and LCFS discipline, we derive approximate expressions for the queueing delays in yield problem detection time and develop near-optimal algorithms to obtain the inspection logistics planning policies
Keywords :
inspection; integrated circuit yield; manufacturing resources planning; quality control; queueing theory; scheduling; semiconductor process modelling; test equipment; approximate expressions; capacity constraint; congestion effects; cost breakdown; first-come-first-serve; inspection logistics planning; inspection planning model; inspection station; last-come-first-serve; mixed discipline; multistage test equipment capacity allocation; near-optimal algorithms; potential yield problems detection; queueing delays; semiconductor fabrication yield enhancement; Capacity planning; Computer science; Delay effects; Environmental management; Fabrication; Inspection; Logistics; Quality control; Quality management; Sampling methods;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3752-2
DOI :
10.1109/ISSM.1997.664628
