DocumentCode

1913142

Title

Simulation of Mechanical Stresses during Shallow Trench Isolation Process

Author

Poncet, Alain ; Bolt, Mike ; Barla, Kathy ; De Wolf, Ingrid

Author_Institution

France Telecom, Meylan, France

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

120

Lastpage

123

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

conf

Filename

1503503