Title :
Active Area Oxidation During the Densification of Shallow Trench Isolation for sub-0.25 micron CMOS
Author :
Bazley, D.J. ; Jones, Sk ; Badenes, G.
Author_Institution :
GEC-Marconi Materials Technolgy Ltd., Northants, UK
Conference_Titel :
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Conference_Location :
Bordeaux, France
Print_ISBN :
2-86332-234-6
