DocumentCode

1913200

Title

Contact Resistance and Current Density Modelling of Silicide Ohmic Contacts for ULSI Devices

Author

Holland, A.S. ; Reeves, G.K. ; Leech, P.W.

Author_Institution

RMIT University, Melbourne, Victoria, Australia

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

128

Lastpage

131

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

conf

Filename

1503505