Title :
Contact Resistance and Current Density Modelling of Silicide Ohmic Contacts for ULSI Devices
Author :
Holland, A.S. ; Reeves, G.K. ; Leech, P.W.
Author_Institution :
RMIT University, Melbourne, Victoria, Australia
Conference_Titel :
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Conference_Location :
Bordeaux, France
Print_ISBN :
2-86332-234-6
