Micromachined J-band rectangular waveguide filter

Fully micromachined waveguide filters are realized based on metal E-plane rods. The rods make a series of shunt inductors separated by the length of the waveguide. Two- and three-pole filter designs for 230~245 GHz bands constructed in WR-3 waveguide are introduced. The filters are microfabricated by etching the rods and waveguides on one silicon wafer which later is bonded with another metal-coated wafer. The devices are measured using a J-band S-parameter test and the measurement results are in good agreement with the simulation results.