• DocumentCode
    1913438
  • Title

    Transport Properties of the SiO(2)/Ta(2)O(5) stack as Gate Dielectric in CMOS Processes

  • Author

    Devoivre, T. ; Papadas, C. ; Ghibaudo, G. ; Pananakakis, G. ; Setton, M. ; Sandler, N.

  • Author_Institution
    SGS-THOMSON Microelectronics, Crolles, France
  • fYear
    1998
  • fDate
    8-10 Sept. 1998
  • Firstpage
    152
  • Lastpage
    155
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1998. Proceeding of the 28th European
  • Conference_Location
    Bordeaux, France
  • Print_ISBN
    2-86332-234-6
  • Type

    conf

  • Filename
    1503511
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1913438