Title :
Sub-0.1um Sidewall Gate MOSFET with Large Angle Tilt Implanted Drain
Author :
To, Kun H. ; Woo, Jason C S
Author_Institution :
University of California, Los Angeles, United States
Conference_Titel :
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Conference_Location :
Bordeaux, France
Print_ISBN :
2-86332-234-6
