Si-Based Resonant Cavity Photodetector with a Buried Oxide Reflector Using a Separation-by-Implantation-of-Oxygen Substrate

Author

Seto, M. ; Sinnis, V.S. ; Morrison, A.P. ; Hoekstra, W. ; de Boer, W.B.

Author_Institution

Philips Research Laboratories, Eindhoven, Netherlands

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

196

Lastpage

199

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

Filename

1503522

Link To Document