Spatial distribution of the high energy density plasma in a coaxial gun for surface modification

Summary form only given. The coaxial plasma gun, by generating the pulsed High Energy Density Plasma (HEDP) with a simple method, is an effective method for materials surface modification. It incorporates fast quenching, ion implantation and film deposition into one process, and produces a modification layer of strongly adhesive to the substrate. The spatial distribution of the plasma stream ejected from the coaxial gun determines the surface modification. In this paper, this problem was investigated on a 40 kV gas-puff coaxial plasma gun by using thermal sensitive (Fax) paper and dosimeter.