Title :
STORM: A European Platform for Sub-Micron Technology Simulation and Optimisation
Author :
Jones, S.K. ; Lombardi, C. ; Poncet, A. ; Hill, C. ; Jaouen, H. ; Lorenz, J. ; Lyden, C. ; De Meyer, K. ; Pelka, J. ; Rudan, M. ; Solmi, S.
Author_Institution :
GEC-Marconi Mater. Technol. Ltd., Towcester, UK
Abstract :
Software for Technology Optimisation in Research and Manufacturing (STORM) is presented and applied to bipolar and cmos silicon technology.
Keywords :
CMOS integrated circuits; bipolar transistors; circuit optimisation; elemental semiconductors; silicon; European platform; STORM; Si; bipolar silicon technology; cmos silicon technology; research and manufacturing; software; sub-micron technology simulation; technology optimisation; CMOS technology; Circuit simulation; Integrated circuit technology; Nonhomogeneous media; Semiconductor device modeling; Semiconductor process modeling; Silicon; Storms; Surfaces; Thermal stresses;
Conference_Titel :
Solid State Device Research Conference, 1993. ESSDERC '93. 23rd European
Conference_Location :
Grenoble
