Rapid MOS-CV Generation Lifetime Mapping Technique for the Characterisation of High Quality Silicon

Author

Sorge, R. ; Schley, P. ; Grabmeier, J. ; Obermeier, G. ; Huber, D. ; Richter, H.

Author_Institution

Institute for Semiconductor Physics, Frankfurt (Oder), Germany

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

296

Lastpage

299

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

Filename

1503547

Link To Document