Design Considerations of High-K Gate Dielectrics and Metal Gate Electrodes for Sub-0.1 um MOSFETs

Author

Cheng, Baohong ; Cao, Min ; Voode, P.V. ; Greene, Wayne ; Stork, Hans ; Yu, Zhiping ; Woo, Jason C S

Author_Institution

University of California, Los Angeles, United States

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

308

Lastpage

311

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

Filename

1503550

Link To Document