Title :
The ADEQUAT project for development and transfer of 0.25 μm logic CMOS modules
Author :
De Keersmaecker, R. ; Félix, P. ; Haond, M. ; Janssen, G. ; Lorenz, J. ; Maes, H. ; Montrée, A. ; Rudan, M. ; Van den Hove, L.
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
The ADEQUAT project (Advanced DEvelopments for QUArter micron CMOS Technologies) aims at developing new device structures and process modules for the 0.25 μm CMOS logic generation offering improved performance with acceptable reliability while still meeting the manufacturability constraints. Several examples of choices illustrating this optimization process are presented together with the overall project organisation and roadmap.
Keywords :
CMOS logic circuits; circuit optimisation; integrated circuit reliability; ADEQUAT project; CMOS logic generation; advanced developments; device structures; logic CMOS modules; optimization; process modules; project organisation; quarter micron CMOS technologies; reliability; roadmap; size 0.25 mum; CMOS logic circuits; CMOS process; CMOS technology; Coatings; Logic devices; Optical reflection; Packaging; Plasma temperature; Research and development; Resists;
Conference_Titel :
Solid State Device Research Conference, 1993. ESSDERC '93. 23rd European
Conference_Location :
Grenoble
