DocumentCode :
1914601
Title :
Three-Dimensional Simulation of TiN Magnetron Sputter Deposition
Author :
Pyka, Wolfgang ; Selberherr, Siegfried
Author_Institution :
TU Vienna, Austria
fYear :
1998
fDate :
8-10 Sept. 1998
Firstpage :
324
Lastpage :
327
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Conference_Location :
Bordeaux, France
Print_ISBN :
2-86332-234-6
Type :
conf
Filename :
1503554
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1914601
