DocumentCode

1914601

Title

Three-Dimensional Simulation of TiN Magnetron Sputter Deposition

Author

Pyka, Wolfgang ; Selberherr, Siegfried

Author_Institution

TU Vienna, Austria

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

324

Lastpage

327

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

conf

Filename

1503554