Title :
A Detailed Study of Electron Mobility Degradation by Surface Scattering in ULSI MOSFET´s
Author :
Mazzoni, G. ; Lacaita, A.L. ; Perron, L.M. ; Pirovano, A.
Author_Institution :
Politecnico di Milano, Italy
Conference_Titel :
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Conference_Location :
Bordeaux, France
Print_ISBN :
2-86332-234-6