• DocumentCode
    1915031
  • Title

    Development of MEMS varactor for selectable-band patch filter

  • Author

    Rehder, G. ; Serrano, A.L.C. ; Correra, F.S. ; Carreño, M. N P

  • Author_Institution
    Lab. of Microelectron., Univ. of Sao Paulo, Sao Paulo, Brazil
  • fYear
    2012
  • fDate
    14-17 March 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The use of MEMS as tuning elements is interesting for their higher performance in terms of loss and nonlinearity. Here, MEMS varactors are integrated to a patch filter through a flip-chip process in order to change the filter center frequency. The selected frequencies are the ones assigned to WiMAX frequency bands at 2.5 GHz and 3.5 GHz.
  • Keywords
    filters; flip-chip devices; micromechanical devices; varactors; MEMS varactor; WiMAX frequency bands; flip-chip process; selectable-band patch filter; tuning elements; Capacitance; Micromechanical devices; Microwave filters; Optical filters; Passband; Resonator filters; Varactors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Devices, Circuits and Systems (ICCDCS), 2012 8th International Caribbean Conference on
  • Conference_Location
    Playa del Carmen
  • Print_ISBN
    978-1-4577-1116-9
  • Electronic_ISBN
    978-1-4577-1115-2
  • Type

    conf

  • DOI
    10.1109/ICCDCS.2012.6188949
  • Filename
    6188949