Title :
Development of MEMS varactor for selectable-band patch filter
Author :
Rehder, G. ; Serrano, A.L.C. ; Correra, F.S. ; Carreño, M. N P
Author_Institution :
Lab. of Microelectron., Univ. of Sao Paulo, Sao Paulo, Brazil
Abstract :
The use of MEMS as tuning elements is interesting for their higher performance in terms of loss and nonlinearity. Here, MEMS varactors are integrated to a patch filter through a flip-chip process in order to change the filter center frequency. The selected frequencies are the ones assigned to WiMAX frequency bands at 2.5 GHz and 3.5 GHz.
Keywords :
filters; flip-chip devices; micromechanical devices; varactors; MEMS varactor; WiMAX frequency bands; flip-chip process; selectable-band patch filter; tuning elements; Capacitance; Micromechanical devices; Microwave filters; Optical filters; Passband; Resonator filters; Varactors;
Conference_Titel :
Devices, Circuits and Systems (ICCDCS), 2012 8th International Caribbean Conference on
Conference_Location :
Playa del Carmen
Print_ISBN :
978-1-4577-1116-9
Electronic_ISBN :
978-1-4577-1115-2
DOI :
10.1109/ICCDCS.2012.6188949
