Title :
Enhanced performance submicron n-type self-aligned HIGFET process using SiO2 spacers
Author :
Touirat, M. ; Roger, M. ; Salmer, G. ; Ajram, Sami ; Fawaz, Hala
Author_Institution :
I.E.M.N., Villeneuve d`Ascq, France
Conference_Titel :
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Conference_Location :
Bordeaux, France
Print_ISBN :
2-86332-234-6
