DocumentCode

1915258

Title

Thin-Film Capacitors with Tantalum-Hafnium Oxide Nanolaminate Insulator

Author

Kattelus, H. ; Ronkainen, H. ; Kanniainen, T. ; Skarp, J.

Author_Institution

VTT Electronics, Finland

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

444

Lastpage

447

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

conf

Filename

1503584