مرکز منطقه ای اطلاع رساني علوم و فناوري - Thin-Film Capacitors with Tantalum-Hafnium Oxide Nanolaminate Insulator

DocumentCode :

1915258

Title :

Thin-Film Capacitors with Tantalum-Hafnium Oxide Nanolaminate Insulator

Author :

Kattelus, H. ; Ronkainen, H. ; Kanniainen, T. ; Skarp, J.

Author_Institution :

VTT Electronics, Finland

fYear :

1998

fDate :

8-10 Sept. 1998

Firstpage :

444

Lastpage :

447

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location :

Bordeaux, France

Print_ISBN :

2-86332-234-6

Type :

conf

Filename :

1503584

Link To Document :