Device Reliability and Repeatability of a High Performance Si/SiGe HBT BiCMOS Technology

Author

Ahlgren, D.C. ; Hueckel, G. ; Freeman, G. ; Walter, K. ; Groves, R. ; Ting, T.H. ; Vayshenker, A. ; Hostetter, E.

Author_Institution

IBM Microelectronics Division, Hopewell Junction, NY, United States

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

452

Lastpage

455

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

Filename

1503586

Link To Document