Silicon Bulk Machining of Electrostatic Micromotors Fabrication and Potential Applications

Two processes based on the bulk machining of silicon, combined to anodic bonding of silicon to glass, where developped for the fabrication of electrostatic microactuators. An original approach was used for the realization of a submillimetric scale, dual stator axial field, rotary electrostatic motor, for which electrochemical etching of silicon with etch stop on junction is the key operation. The second prototype is a millimetric sized, linear electrostatic actuator .The fabrication is based on etch rate selectivity between silicon crystalline planes.