Title :
Model of detection for a modulated conductivity sensor: application for a NOx gas sensor
Author :
Gutiérrez, J. ; Arés, L. ; Robla, J.I. ; Sayago, I. ; Horrillo, M.C. ; Agapito, J.A.
Author_Institution :
Lab. de Sensores, C.S.I.C., Madrid, Spain
Abstract :
The performance of a chemical gas sensor based on polycrystalline tin oxide films is strongly related to their structure, thickness and doping. In previous works we have studied the influence of the thickness on the detection by impedance spectroscopy analysis [1,2]. In the present work we have focused our attention in designing and modelizing a sensor for detection of NOx for environmental applications. Reactive sputtered films with Al, In and Pt were characterized by complex impedance spectroscopy, Hall effect and d.c measurements.
Keywords :
gas sensors; nitrogen compounds; DC measurements; Hall effect; NOx; chemical gas sensor; complex impedance spectroscopy; environmental applications; impedance spectroscopy analysis; modulated conductivity sensor; polycristallyne tin oxide films; reactive sputtered films; Artificial intelligence; Chemical sensors; Conductivity; Doping; Electrochemical impedance spectroscopy; Gas detectors; Impedance measurement; Semiconductor process modeling; Sensor phenomena and characterization; Tin;
Conference_Titel :
Solid State Device Research Conference, 1993. ESSDERC '93. 23rd European
Conference_Location :
Grenoble
