Study of MoS2/SiC thin films on GCr15 steel substrate

Author

Jiaming Ji ; Xiaojing Wang ; Honghong Shao ; Ji Wang

Author_Institution

Sch. of Mater. Sci. & Eng., Jiangsu Univ., Zhenjiang, China

Volume

2

fYear

2011

fDate

20-22 May 2011

Firstpage

1932

Lastpage

1936

Abstract

The MoS₂/SiC thin films were deposited on GCr15 steel substrate using radio frequency magnetron sputtering technique. Surface morphology, components and mechanical properties of the films were investigated by scanning electron microscopy, energy spectrometer, friction and wear tester and scratch tester, respectively. It was found that the surface morphology of the MoS₂/SiC films prepared on GCr15 steel substrate was vermicular. The SiC inner layer and the MoS₂ outer layer were binded tightly with a smooth interface and the thickness of the films was about 0.8 μm. The films-substrate system exhibited excellent friction and wear properties with a mean friction coefficient of about 0.11. Interlayers added into the films can improve the cohesion from 21 N to 26 N.

Keywords

X-ray chemical analysis; friction; molybdenum compounds; scanning electron microscopy; silicon compounds; sputter deposition; surface morphology; thin films; wear; wear testing; wide band gap semiconductors; MoS_2-SiC; cohesion; energy spectrometer; film-substrate system; friction coefficient; friction tester; radio frequency magnetron sputtering; scanning electron microscopy; scratch tester; steel substrate; surface morphology; thin films; wear tester; Atomic layer deposition; Friction; Magnetic films; Silicon; Silicon carbide; MoS2/SiC films; cohesion; magnetron sputtering; mechanical properties; microstructure;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Renewable Energy & Environment (ICMREE), 2011 International Conference on

Conference_Location

Shanghai

Print_ISBN

978-1-61284-749-8

Type

conf

DOI

10.1109/ICMREE.2011.5930715

Filename

5930715