Title :
Channel spacing control of microring resonator add/drop filter array by UV trimming technique
Author :
Suzuki, Shuichi ; Hatakeyama, Yutaka ; Kokubun, Yasuo ; Chu, Sai Tak
Author_Institution :
Graduate Sch. of Eng, Yokohama Nat. Univ., Japan
Abstract :
In the multi-channel microring resonator filter, the wavelength channel spacing was limited to 5.7 nm due to the resolution limit of the photomask (50 nm). Therefore, we developed a new technique to control precisely the channel spacing by a UV-trimming technique using polysilane as the over-cladding layer. As a result, we successfully decreased the channel spacing to 0.5 nm, and also controlled the channel spacing precisely to 1.0 nm using the same trimming technique.
Keywords :
masks; optical arrays; optical communication equipment; optical resonators; optical waveguide filters; resonator filters; telecommunication channels; ultraviolet lithography; wavelength division multiplexing; 0.5 nm; 1.0 nm; 5.7 nm; 50 nm; UV trimming technique; channel spacing control; microring resonator add/drop filter array; multi-channel microring resonator filter; over-cladding layer; photomask; polysilane; resolution limit; wavelength channel spacing; Channel spacing; Electronic mail; Optical arrays; Optical filters; Optical resonators; Polymers; Refractive index; Resonator filters; Throughput; USA Councils;
Conference_Titel :
Fibre and Optical Passive Components, 2002. Proceedings of 2002 IEEE/LEOS Workshop on
Print_ISBN :
0-7803-7556-4
DOI :
10.1109/FOPC.2002.1015802
