Title :
Thin-film NTC resistor based on SrNbxTi1-xO 3
Author :
Lai, P.T. ; Bin Li ; Li, G.Q.
Author_Institution :
Dept. of Electr. & Electron. Eng., Hong Kong Univ., Hong Kong
Abstract :
A novel strontium titanate-niobate (SrNbxTi1-x O3) thin-film NTC (negative temperature coefficient) resistor is fabricated on a SiO2/Si substrate by rf sputtering technique. The resistance-temperature characteristics reveal that SrNbxTi1-xO3 thin-film resistor has a high sensitivity within 30°C~400°C. Specifically, there is a turning point at 320°C, above which the resistance sharply decreases due to ionic conduction. The a.c characteristics are also investigated
Keywords :
ferroelectric materials; ferroelectric thin films; sputtered coatings; strontium compounds; thin film resistors; 30 to 400 C; 320 C; SrNbxTi1-xO3; SrNbO3TiO3; ionic conduction; negative temperature coefficient resistor; resistance-temperature characteristics; rf sputtering; thin-film NTC resistor; Ceramics; Resistors; Semiconductivity; Semiconductor thin films; Sputtering; Temperature dependence; Thin film circuits; Thin film sensors; Transistors; Voltage;
Conference_Titel :
Electron Devices Meeting, 1999. Proceedings. 1999 IEEE Hong Kong
Conference_Location :
Shatin
Print_ISBN :
0-7803-5648-9
DOI :
10.1109/HKEDM.1999.836412
