Title :
A New Lateral NPN Transistor Structure for Power MOSFETs with On-Chip Protection
Author :
Zambrano, R. ; Montalbano, G. ; Leonardi, S.
Author_Institution :
Co..Ri.M.Me. Res. Center, SGS-Thomson Microelectron., Catania, Italy
Abstract :
Power MOSFETs with built-in shorted load protection featuring a circuit based on a lateral npn transistor (LNPN) have been reported recently, however their performance can be limited by a parasitic vertical npn transistor (VNPN). In this paper a new LNPN structure is presented, which overcomes this problem. A dedicated implant has been introduced to optimize the performance of this new component. The results of the computer simulations are in good agreement with the experimental data. Power MOSFETs featuring the new component have been fabricated which are protected against load short circuit, overcurrents, ESD and overvoltages.
Keywords :
power MOSFET; LNPN; VNPN; lateral NPN transistor structure; on-chip protection; parasitic vertical NPN transistor; power MOSFET; Body regions; Circuits; Computer simulation; Electrostatic discharge; Implants; MOSFETs; Microelectronics; Protection; Strips; Voltage;
Conference_Titel :
Solid State Device Research Conference, 1993. ESSDERC '93. 23rd European
Conference_Location :
Grenoble