DocumentCode
1916456
Title
TiNi shape memory alloy thin film rotating actuator
Author
Ma, C.C. ; Wu, Z.J. ; Sun, Q.P. ; Zohar, Y. ; Wong, M.
Author_Institution
Hong Kong Univ. of Sci. & Technol., Hong Kong
fYear
1999
fDate
1999
Firstpage
84
Lastpage
87
Abstract
Nickel titanium (TiNi) shape memory alloy thin film is a promising candidate for microactuation because of its large deformation and recovery force, good electrical and mechanical properties, long fatigue life, and high corrosion resistance
Keywords
corrosion resistance; microactuators; nickel alloys; shape memory effects; titanium alloys; -topic d: sensors and actuators; TiNi; TiNi shape memory alloy; high corrosion resistance; large deformation; long fatigue life; microactuation; recovery force; thin film rotating actuator; Actuators; Aging; Annealing; Crystallization; Residual stresses; Shape memory alloys; Sputtering; Stress measurement; Temperature; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1999. Proceedings. 1999 IEEE Hong Kong
Conference_Location
Shatin
Print_ISBN
0-7803-5648-9
Type
conf
DOI
10.1109/HKEDM.1999.836414
Filename
836414
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