Title :
TiNi shape memory alloy thin film rotating actuator
Author :
Ma, C.C. ; Wu, Z.J. ; Sun, Q.P. ; Zohar, Y. ; Wong, M.
Author_Institution :
Hong Kong Univ. of Sci. & Technol., Hong Kong
Abstract :
Nickel titanium (TiNi) shape memory alloy thin film is a promising candidate for microactuation because of its large deformation and recovery force, good electrical and mechanical properties, long fatigue life, and high corrosion resistance
Keywords :
corrosion resistance; microactuators; nickel alloys; shape memory effects; titanium alloys; -topic d: sensors and actuators; TiNi; TiNi shape memory alloy; high corrosion resistance; large deformation; long fatigue life; microactuation; recovery force; thin film rotating actuator; Actuators; Aging; Annealing; Crystallization; Residual stresses; Shape memory alloys; Sputtering; Stress measurement; Temperature; Thin film sensors;
Conference_Titel :
Electron Devices Meeting, 1999. Proceedings. 1999 IEEE Hong Kong
Conference_Location :
Shatin
Print_ISBN :
0-7803-5648-9
DOI :
10.1109/HKEDM.1999.836414
