DocumentCode
1916809
Title
Challenges and Recent Developments in Device Isolation Technology
Author
Schwalke, Udo
Author_Institution
Infineon Technologies AG, Munich, Germany
fYear
2000
fDate
11-13 September 2000
Firstpage
44
Lastpage
53
Keywords
Application specific integrated circuits; Etching; Integrated circuit technology; Isolation technology; Lithography; Nonvolatile memory; Oxidation; Planarization; Silicon; System-on-a-chip;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN
2-86332-248-6
Type
conf
DOI
10.1109/ESSDERC.2000.194716
Filename
1503646
Link To Document