DocumentCode

1916854

Title

Atomistic Insights into Ultra-Shallow Junction Formation

Author

Griffin, Peter B.

Author_Institution

Stanford University, CA, USA

fYear

2000

fDate

11-13 September 2000

Firstpage

60

Lastpage

63

Keywords

Annealing; Atomic layer deposition; Implants; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2000. Proceeding of the 30th European

Print_ISBN

2-86332-248-6

Type

conf

DOI

10.1109/ESSDERC.2000.194718

Filename

1503648