Title :
Breakdown and Recovery of Thin Gate Oxides
Author :
Bearda, Twan ; Mertens, Paul W. ; Heyns, Marc M. ; Woerlee, Pierre ; Wallinga, Hans
Author_Institution :
IMEC, Leuven, Belgium
fDate :
11-13 September 2000
Keywords :
Breakdown voltage; Carbon capture and storage; Conductivity; Electric breakdown; Frequency; Impedance; Noise level; Stress; Testing; Time measurement;
Conference_Titel :
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN :
2-86332-248-6
DOI :
10.1109/ESSDERC.2000.194728
