Title :
Study of Secondary Electron Injection Phenomena in Deep Sub-micron MOSFETs and Flash Cells
Author :
Xue, G. ; Van Houdt, J. ; Wellekens, D. ; Haspeslagh, L. ; Lorenzini, M. ; Keppens, B. ; Maes, H.
Author_Institution :
IMEC, Leuven, Belgium and KU Leuven, Belgium
fDate :
11-13 September 2000
Keywords :
CMOS logic circuits; Charge pumps; Electron traps; Flash memory cells; Logic devices; Logic programming; Low voltage; MOSFETs; Secondary generated hot electron injection; Split gate flash memory cells;
Conference_Titel :
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN :
2-86332-248-6
DOI :
10.1109/ESSDERC.2000.194735
