DocumentCode

1917620

Title

The influence of silicon interstitial clusters on the Reverse Short Channel Effect

Author

Tsamis, C. ; Tsoukalas, D. ; Tserepi, A. ; Tsoi, E.

Author_Institution

NCSR Demokritos, Aghia Paraskevi, Greece

fYear

2000

fDate

11-13 September 2000

Firstpage

172

Lastpage

175

Keywords

Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2000. Proceeding of the 30th European

Print_ISBN

2-86332-248-6

Type

conf

DOI

10.1109/ESSDERC.2000.194742

Filename

1503672