Title :
Best Structures for Deep Submicron (0.1-0.3/spl mu/m) Mos Devices
Author_Institution :
University of Texas, Austin
Keywords :
History; Hot carriers; Integrated circuit technology; MOS devices; MOS integrated circuits; MOSFET circuits; Manufacturing; Power supplies; Transistors; Voltage;
Conference_Titel :
Device Research Conference, 1991. 49th Annual
Conference_Location :
Boulder, CO, USA
Print_ISBN :
0-87942-647-0
DOI :
10.1109/DRC.1991.664660