• DocumentCode
    1917877
  • Title

    Shallow and Deep Trench Isolation for use in RF-Bipolar IC:s

  • Author

    Forsberg, M. ; Bormander, C. ; Johansson, T. ; Ko, T. ; Liu, W. ; Vellaikal, M. ; Cheshire, A.

  • Author_Institution
    Ericsson Microelectronics AB, Kista, Sweden
  • fYear
    2000
  • fDate
    11-13 September 2000
  • Firstpage
    212
  • Lastpage
    215
  • Keywords
    BiCMOS integrated circuits; Bipolar integrated circuits; Chemistry; Driver circuits; Etching; Lithography; Microelectronics; Radio frequency; Resists; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 2000. Proceeding of the 30th European
  • Print_ISBN
    2-86332-248-6
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2000.194752
  • Filename
    1503682
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1917877