• DocumentCode
    1918473
  • Title

    Characterisation of Mechanical Stress in Advanced PBL Isolation

  • Author

    Jones, S.K. ; Ahmed, M ; Rothwell, W.J. ; De Wolf, I ; Deferm, L

  • Author_Institution
    GEC-Marconi Materials Technology Ltd, Caswell, Towcester, Northants NN12 8EQ, UK
  • fYear
    1994
  • fDate
    11-15 Sept. 1994
  • Firstpage
    255
  • Lastpage
    258
  • Abstract
    The characterisation of 1D and 2D stress distributions in poly-buffered LOCOS (PBL) isolation structures for using Micro-Raman mapping with TEM measurements of topography is presented. Measurements have been made on devices produced within the development of 0.35 ¿m cmos isolation modules.
  • Keywords
    Compressive stress; Geometrical optics; Geometry; Mechanical variables measurement; Oxidation; Probes; Spatial resolution; Stress measurement; Surfaces; Tensile stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1994. ESSDERC '94. 24th European
  • Conference_Location
    Edinburgh, Scotland
  • Print_ISBN
    0863321579
  • Type

    conf

  • Filename
    5435714
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1918473