Title :
Technique of electronic mean´s structures defectiveness estimation
Author :
Pavlysh, Volodymyr ; Danchyshyn, Igor ; Korzh, Roman ; Vyshnyakov, Dmytro
Author_Institution :
EMCIT Dept., Nat. Univ. Lvivska Politechnika, Lviv, Ukraine
Abstract :
Defectiveness estimation technique of microelectronic device´s structures is proposed.
Keywords :
quality control; defectiveness estimation; electronic mean; microelectronic device; quality assurance; Conductivity; Electronic equipment testing; Manufacturing processes; Microelectronics; Microstructure; Optimized production technology; Paper technology; Pulp manufacturing; Quality assurance; Semiconductor thin films;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2002. Proceedings of the International Conference
Print_ISBN :
966-553-234-0
DOI :
10.1109/TCSET.2002.1015893
