DocumentCode
1918585
Title
Technique of electronic mean´s structures defectiveness estimation
Author
Pavlysh, Volodymyr ; Danchyshyn, Igor ; Korzh, Roman ; Vyshnyakov, Dmytro
Author_Institution
EMCIT Dept., Nat. Univ. Lvivska Politechnika, Lviv, Ukraine
fYear
2002
fDate
2002
Firstpage
140
Abstract
Defectiveness estimation technique of microelectronic device´s structures is proposed.
Keywords
quality control; defectiveness estimation; electronic mean; microelectronic device; quality assurance; Conductivity; Electronic equipment testing; Manufacturing processes; Microelectronics; Microstructure; Optimized production technology; Paper technology; Pulp manufacturing; Quality assurance; Semiconductor thin films;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2002. Proceedings of the International Conference
Print_ISBN
966-553-234-0
Type
conf
DOI
10.1109/TCSET.2002.1015893
Filename
1015893
Link To Document