• DocumentCode
    1918745
  • Title

    Characterization of Two E´ Center Charge Traps in Conventionally Grown Thermal SiO2 ON Si

  • Author

    Conley, J.F., Jr. ; Lenahan, P.M. ; Evans, H.L. ; Lowry, R.K. ; Morthorst, T.J.

  • Author_Institution
    Penn State University, University Park, PA 16802
  • fYear
    1994
  • fDate
    11-15 Sept. 1994
  • Firstpage
    309
  • Lastpage
    312
  • Abstract
    We use electron spin resonance to characterize two E´ variant charge traps in conventionally grown thermal SiO2.
  • Keywords
    Corona; Electron traps; Laboratories; Paramagnetic materials; Paramagnetic resonance; Reliability engineering; Signal generators; Silicon; Thermal engineering; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1994. ESSDERC '94. 24th European
  • Conference_Location
    Edinburgh, Scotland
  • Print_ISBN
    0863321579
  • Type

    conf

  • Filename
    5435724
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1918745