DocumentCode :
1919000
Title :
Three-Dimensional, Electro-Mechanical Simulation of a Silicon Pressure Sensor
Author :
Ciampolini, P. ; Pierantoni, A. ; Rudan, M.
Author_Institution :
UniversitÃ\xa0 di Perugia, Santa Lucia-Canetola, 06131 Perugia, Italy
fYear :
1994
fDate :
11-15 Sept. 1994
Firstpage :
343
Lastpage :
346
Keywords :
Bridge circuits; Conductivity; Mechanical factors; Mechanical sensors; Optical sensors; Optical signal processing; Resistors; Sensor phenomena and characterization; Silicon; Tensile stress;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Device Research Conference, 1994. ESSDERC '94. 24th European
Conference_Location :
Edinburgh, Scotland
Print_ISBN :
0863321579
Type :
conf
Filename :
5435732
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1919000
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