DocumentCode
1919000
Title
Three-Dimensional, Electro-Mechanical Simulation of a Silicon Pressure Sensor
Author
Ciampolini, P. ; Pierantoni, A. ; Rudan, M.
Author_Institution
UniversitÃ\xa0 di Perugia, Santa Lucia-Canetola, 06131 Perugia, Italy
fYear
1994
fDate
11-15 Sept. 1994
Firstpage
343
Lastpage
346
Keywords
Bridge circuits; Conductivity; Mechanical factors; Mechanical sensors; Optical sensors; Optical signal processing; Resistors; Sensor phenomena and characterization; Silicon; Tensile stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1994. ESSDERC '94. 24th European
Conference_Location
Edinburgh, Scotland
Print_ISBN
0863321579
Type
conf
Filename
5435732
Link To Document