Improving Three-Dimensional Semiconductor Modeling through Layout and Process Flow Analysis

Constructive Solid Geometry (CSG) is a solid modeling technique widely used for the design of semiconductor devices. With the simulation domain subdivision algorithm presented in this paper, the minimal number of solid modeling operations is required in order to build a three-dimensional (3D) device structure. The algorithm is based on a drawing method which combines information on photolithographic masks into a color raster. In this way, solid modeling operations are performed only once on regions having the same color.