Title :
3D self-assembling and actuation of electrostatic micro-mirrors
Author :
Quévy, E. ; Buchaillot, L. ; Bigotte, P. ; Collard, D.
Author_Institution :
Institut d´´Electronique et de Microelectronique du Nord, Lille, France
fDate :
11-13 September 2000
Keywords :
Electrodes; Electrostatic actuators; Micromirrors; Mirrors; Shape; Springs; Voltage;
Conference_Titel :
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN :
2-86332-248-6
DOI :
10.1109/ESSDERC.2000.194802
